The CT 100 is a compact, high resolution non-contact profilometer. The main components of the system are a white light sensor and a x-, y-motion system on a granite platform. The chromatic white light sensors combine high accuracy and high measurement speed.
The sensors are available with a resolution down to 3 nm and measurement range up to 12 mm. The system can scan a maximum area of 150 mm x 150 mm.
The CT WL200D is a metrology system for fully automated surface measurement on wafers. It can combine two CT 300 with an automated robot handling for maximum throughput and highly reliable surface measurement without operator interference.
KEY FEATURES: Optimized for maximum throughput / Automated wafer handling / Two CT300 dockable / Stainless steel housing / Software package M-LINK for remote control / SECS/GEM Automation
The CT 300 is a non-contact 3D profilometer and can handle 12” wafers or other large parts. Using a chromatic white light line sensor up to 1.15 million datapoints per second can be measured. The confocal microscope and 3D white light interferometer sensors offer unmatched resolution in z-direction down to 0.1 nm. With our multi-sensor technology several sensor heads can be mounted simultaneously including infrared interferometers for measuring wafer thickness.
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